FS100 Flood Source

Robust electron source for charge neutralization of positively charged samples.

Description

For charge neutralization of positively charged samples like semiconductors or insulators in e.g. XPS/AES or SIMS experiments, OmniVac provides the FS 100 Flood Source, an easy to handle and reliable flood source.

The FS 100 provides a constant flux of low energy electrons which serve for effective charge neutralization in the region of interest.

The PS-FS 100 power supply allows for an easy control of the important working parameters, i.e. electron energy and emission current.

FS 100 Flood Source

Kinetic energy range 0 – 500 eV
Measured beam currents on sample (grounded, 25 x 25 mm²) 0.1 µA (at 0.1 eV)
24 µA (at 1 eV)
130 µA (at 10 eV)
1500 µA (at 500 eV)
Beam diameter (FWHM) 11 mm at 500 eV
Bakeable up to 250 °C
Mounting flange DN 40 CF
Insertion depth 146 mm
Working distance 40 mm

PS-FS 100 Power Supply

Selectable energy ranges 0 – 10 eV and 0 – 500 eV
Interfaces Electron kinetic energy
Dimension (W x H x D) 19’’ x 133 mm x 374 mm